Specializing in Fluid Measurement and Conveyance Projects Since 2008

GMFM-CXB Gas Mass Flow Controller: An intelligent flow control solution for semiconductor, laboratory, and industrial gas applications

2026-10-28

GMFM-CXB Gas Mass Flow Controller: An intelligent flow control solution for semiconductor, laboratory, and industrial gas applications 2

GMFM-CXB Gas Mass Flow Controller: An intelligent flow control solution for semiconductor, laboratory, and industrial gas applications 3

When Gas Flow Control Must Be Exact

Mass flow controllers are not optional accessories. They are the foundation of process repeatability.

Too much gas – wasted material, unsafe conditions, ruined wafers.
Too little gas – incomplete reactions, failed experiments, inconsistent results.

The GMFM-CXB was built to eliminate that uncertainty.

It measures and controls gas mass flow directly – not volume, not pressure. Mass. The only measurement that matters when temperature and pressure fluctuate.

Built for the Most Demanding Gas Applications

Your Challenge	GMFM-CXB Answer
Ultra-low flow	0~5 SCCM to 0~500 SLM – covers micro-dosing to production-scale flow
High pressure	Up to 3 MPa – handles pressurized gas supplies
Corrosive gases	316L stainless steel base – compatible with reactive and specialty gases
Fast process changes	Response time 1~4 seconds (gas characteristics) – keeps up with dynamic steps
High accuracy	1% accuracy, 0.2% repeatability – reliable data every time
Multiple communication options	RS485/Modbus/RS232/HART/Profibus – integrates with any control system
Leak-free operation	Leakage rate 1×10⁻⁹ sccs He – ultra-tight, safe for hazardous gases
Multiple fitting options	Φ3 / Φ6 / Φ10 / 1/8" / 1/4" / 3/8" – matches your existing plumbing
Wide power options	220VAC or 24VDC – flexible installation
Certified quality	ISO, CE certified – meets international standards

Why Mass Flow Control – Not Pressure Regulation

Control Type	Limitation	GMFM-CXB Advantage
Pressure regulator	Controls pressure, not flow – flow varies with downstream conditions	Direct mass flow control – flow stays where you set it
Manual needle valve	Requires constant adjustment, drifts with temperature and pressure	Automatic, stable, repeatable – set it and trust it
Fixed orifice	One flow rate only – cannot adapt to process changes	Adjustable setpoint, wide range, fast response
Mass flow meter only	Measures but does not control – needs separate valve	Integrated control valve and sensor – one instrument, closed-loop control

Key Specifications

Parameter	Value
Product Name	High Accuracy Gas Mass Flow Controller
Model	GMFM-CXB
Accuracy	1%
Repeatability	0.2%
Flow Range	0~5, 10, 20, 30, 50, 100, 200, 300, 500... SCCM; 0~1, 2, 3, 5, 10, 50, 100, 200, 500... SLM
Power Supply	220VAC / 24VDC (DC+24V)
Differential Pressure Range	0.1 ~ 0.5 MPa
Max Pressure	3 MPa
Working Temperature	0 ~ 50°C
Response Time	Electrical: 10 sec; Gas: 1~4 sec
Communication	RS485 / Modbus / RS232 / HART / Profibus
Analog Output	DC 0~5V
Digital Output	RS485 MODBUS
Electrical Connection	DB15
Leakage Rate	1×10⁻⁹ sccs He
Material of Base	316L Stainless Steel
Seal Material	FKM, Nitrile Butadiene Rubber, Chloroprene Rubber
Fittings	Φ3, Φ6, Φ10, 1/8", 1/4", 3/8"
Display	LCD Digital
Certificate	ISO, CE
Warranty	1 year
Customization	OEM, ODM, OBM

What Sets GMFM-CXB Apart

Feature	What It Means for You
1% accuracy	Your process is repeatable – batch after batch, run after run
0.2% repeatability	Consistent readings every time – no drift, no surprise
Wide flow range	0~5 SCCM to 0~500 SLM – one platform for micro and production flow
316L stainless steel base	Compatible with corrosive, reactive, and high-purity gases
Ultra-low leakage	1×10⁻⁹ sccs He – safe for hazardous and expensive gases
Fast response	1~4 seconds (gas) – keeps up with dynamic process steps
Multiple communication options	RS485, Modbus, RS232, HART, Profibus – connects to any system
LCD digital display	Local readout – easy to read, easy to operate
DB15 electrical connection	Standard industrial interface – reliable, easy to wire
Multiple fitting options	Connects to your existing system without adapters
ISO and CE certified	Meets international quality and safety standards

Typical Applications

Industry	Application	Why GMFM-CXB
Semiconductor	Diffusion, epitaxy, CVD, oxidation, plasma etching, sputtering, ion implantation	High precision, micro flow, 316L construction
Special Materials	Optical fiber smelting, thin-film deposition, sputtering targets	Accurate gas delivery, stable flow
Chemical	Microreaction devices, mixed gas distribution systems, catalyst research	Fast response, wide flow range, multiple communications
Analytical Instruments	Gas chromatographs, capillary measurement, calibration systems	0.2% repeatability, precise control
Pharmaceutical	Fermentation gas control, nitrogen blanketing	Accurate, traceable, reliable
Environmental	Calibration gas blending, emissions monitoring	Precise ratio control, RS485 integration
Vacuum and Lighting	Vacuum lamps, specialty lighting, plasma processes	Stable flow, leak-free operation
Coating Equipment	Sputtering, evaporation, plasma coating	Accurate gas control, fast response

One Question

Would you rather adjust a valve by hand – or set a flow and trust it?

Manual adjustment drifts. Pressure regulators cannot control flow. Fixed orifices cannot adapt.

Closed-loop mass flow control keeps your process where you set it.

The GMFM-CXB gives you the control you need.

Ready to specify the GMFM-CXB for your gas system?

Contact us with your gas type, flow range, pressure, temperature, communication, and fitting requirements. We'll recommend the right configuration and provide a quote within 24 hours.

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Shanghai Cixi Instrument CO.,LTD was founded in 2008 and is located in Shanghai Songjiang industrial park. We are the professional flow meter manufacture who integrate R&D, production and sales as one manufacturers.

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