Place of Origin: Shanghai, China
Warranty: 1 year
Customized support: OEM, ODM, OBM
Brand Name: GN
Model Number: CX-GMFM-CXB
Product Name: High Accuracy Gas Mass Flow Controller
Accuracy: 1%
Power supply: 220VAC/ 24VDC
Application: Measuring Gas
Communication: RS485/ Modbus/RS232/ HART/Profibus
Material: SS304/316L
Display: LCD Digital
CX-GMFCXB
Gas Mass Flow Controller
Mass Flow Controller (MFC) Used to accurately measure and control the mass flow of gas. They play an important role in scientific research and production in various fields such as semiconductors and integrated circuit industries, special materials disciplines, chemical industry, and industrial, pharmaceutical, environmental protection, and vacuum lamps.
Typical applications include: electronic process equipment such as diffusion, epitaxy, CVD, oxidation, plasma etching, sputtering, and ion implantation; and coating equipment, optical fiber smelting, microreaction devices, mixed gas distribution systems, capillary measurement, Gas chromatographs and other analytical instruments.
Product Parameters
Flow range |
(0~5, 10, 20, 30, 50, 100, 200, 300, 500...) SCCM;(0~1, 2, 3, 5, 10, 50, 100, 200, 500...) SLM |
Power supply |
DC+24V |
Linearity |
ISO, CE |
Repeatability |
0.2% |
Responding time |
Electrical characteristics: 10sec gas characteristics: (1~4) sec |
Differential pressure range |
0.1~0.5MPa |
Max pressure |
3MPa |
Working temperature |
0~50℃ |
Accuracy |
1% |
Medium |
Gas |
Digital value |
RS485 MODBUS |
Analog value |
DC0~5V |
Electrical connection |
DB15 |
Leakage rate |
1×1000000000sccsHe |
Certificate |
ISO, CE |
Material of base |
316L Stainless steel |
Seal material |
FKM, nitrile butadiene rubber, chloroprene rubber |
Glad hand |
Φ3, Φ6, Φ10, 1/8".1/4" 3/8" |
Model |
Flow Range |
Connection |
CX-F1 |
0~10sccm |
6mm connector |
CX-F2 |
1~100sccm |
6mm connector |
CX-F3 |
0.3~30slm |
6mm connector |
CX-F4 |
1.5~150slm |
10mm connector |
CX-F5 |
2.5~250slm |
12mm connector |
CX-F6 |
10~1000slm |
12mm connector |
CX-F7 |
20~2000slm |
12mm connector |
Product Details