Mass Flow Controller (MFC) Used to accurately measure and control the mass flow of gas. The mass flow meter controller can control the regulating valve to automatically complete the flow adjustment. The program controls the regulating valve to complete the automatic adjustment of the flow. Flow meter controller has small size, high integration, high accuracy, and adjustment time, easy to use, stable work, etc.

The flow meter controller plays an important role in scientific research and production in various fields such as semiconductors and integrated circuit industries, special materials disciplines, chemical industry, and industrial, pharmaceutical, environmental protection, and vacuum lamps. Typical applications of mass flow meter controller include electronic process equipment such as diffusion, epitaxy, CVD, oxidation, plasma etching, sputtering, and ion implantation; and coating equipment, optical fibre smelting, microreaction devices, mixed gas distribution systems, capillary measurement, Gas chromatographs and other analytical instruments.