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MFC-UT Series Gas mass flow controller
MFC-UT Series Mass Flow Controller (MFC) is a compact product developed based on industry’s advanced MEMS flow sensor chip, combined with high-speed sampling processing technology and digital compensation algorithm. The product is equipped with imported electromagnetic proportional valve, 316L stainless steel gas seat, and high precision MEMS flow chip, etc. The ultra-high integration reduces the size of the product by half, which can be better applied to installation places with strict space requirements.
Features
| Wide measuring ranges | Micro | High precision |
| Low pressure drop | Small size | Fast response |
Technical Data
| Model Number: / | Voltage: DC24V，corrugation ≤50mV |
Precision: ±1%F.S | Operating temperature: 0~50℃ |
Flow range: 0~20SLM | Work pressure: 0~1MPa |
Resolution: Lowest 0.01SCCM | Response time: ≤1S |
Downloads
Dateiformat P D F
