F1 Mass Flow Controller (MFC)
When Gas Flow Must Be Exact
Mass flow controllers are not optional accessories. They are the foundation of process repeatability.
Too much gas – wasted material, unsafe conditions, ruined wafers.
Too little gas – incomplete reactions, failed experiments, inconsistent results.
The F1 was built to eliminate that uncertainty.
It measures and controls gas mass flow directly – not volume, not pressure. Mass. The only measurement that matters when temperature and pressure fluctuate.
Built for the Most Demanding Gas Applications
| Your Challenge | F1 Answer |
|---|---|
| Ultra-low flow | 0~10 sccm range – precise control at the micro scale |
| High pressure | 3 MPa working pressure – handles pressurized gas supplies |
| Corrosive gases | 316L stainless steel base – compatible with reactive and specialty gases |
| Fast process changes | Fast response – keeps up with dynamic process steps |
| Space constraints | Small size – fits into compact gas panels and OEM equipment |
| System integration | DC +15V/24V power, 0~5V / 4~20mA analog output – direct to your controller |
| Multiple fitting options | Φ3 / Φ6 / Φ10 / 1/8" / 1/4" / 3/8" – matches your existing plumbing |
Why Mass Flow – Not Volume Flow
Most flowmeters measure volume. But gas volume changes with temperature and pressure.
Mass flow doesn't change. A gram of gas is a gram of gas – whether it's in a cold lab or a hot reactor.
This is why mass flow controllers are the standard in:
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Semiconductor manufacturing – where process repeatability determines yield
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Chemical research – where reaction stoichiometry must be exact
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Pharmaceutical production – where regulatory compliance demands traceability
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Environmental monitoring – where calibration gases must be precise
Key Specifications
| Parameter | Value |
|---|---|
| Model | F1 |
| Accuracy | 0.5% |
| Flow Range | 0 ~ 10 sccm |
| Working Pressure | 3 MPa |
| Base Material | 316L Stainless Steel |
| Power Supply | DC +15V / 24V |
| Analog Output | DC 0~5V / 4~20mA |
| Fittings | Φ3 / Φ6 / Φ10 / 1/8" / 1/4" / 3/8" |
| Measuring Principle | Mass Flow (Thermal) |
Typical Applications
Semiconductor and Integrated Circuits
Diffusion, epitaxy, CVD, oxidation, plasma etching, sputtering, ion implantation – every process step depends on precise gas delivery.
Special Materials and Coating
Optical fiber smelting, thin-film deposition, sputtering targets – where gas composition determines material properties.
Chemical and Petrochemical
Microreaction devices, mixed gas distribution systems, catalyst research – where stoichiometry must be exact.
Analytical Instruments
Gas chromatographs, capillary measurement, calibration systems – where reference standards demand accuracy.
Pharmaceutical and Environmental
Fermentation process control, emissions monitoring, calibration gas blending – where compliance and safety are non-negotiable.
Vacuum and Lighting
Vacuum lamps, specialty lighting, plasma processes – where gas purity and flow stability matter.
What Sets the F1 Apart
| Feature | What It Means for You |
|---|---|
| 0.5% accuracy | Your process is repeatable – batch after batch, run after run |
| 0~10 sccm range | Micro-flow control for delicate processes and small-scale reactions |
| 316L construction | Compatible with corrosive, reactive, and high-purity gases |
| Fast response | Keeps up with rapid process changes and pulsed flow requirements |
| Low pressure drop | Minimizes supply pressure requirements and saves energy |
| Compact size | Easy integration into OEM equipment and retrofits |
| Multiple fitting options | Connects to your existing system without adapters |
One Question
Would you rather guess your gas flow – or know it?
Guessing leads to scrap. Guessing leads to failed experiments. Guessing leads to regulatory findings.
Knowing leads to repeatability. Knowing leads to yield. Knowing leads to confidence.
The F1 gives you the number you can trust.
Ready to specify the F1 for your gas system?
Contact us with your gas type, flow range, pressure, and fitting requirements. We'll confirm compatibility and provide a quote within 24 hours.
