Mid range Differential pressure gas mass flow meter
Mass Flow Controller(MFC)Used to accurately measure and control the
mass flow of gas. They play an important role in scientific research and
production in various fields such as semiconductors and integrated cir-
cuit industries,special materials disciplines, chemical industry, and indu-
strial, pharmaceutical, environmental protection, and vacuum lamps.
Typical applications include: electronic process equipment such as dif-
fusion,epitaxy,CVD,oxidation,plasma etching,sputtering,and ion impla-
ntation ; and coating equipment, optical fiber smelting, microreaction
devices, mixed gas distribution systems, capillary measurement, Gas
chromatographs and other analytical instruments
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Features
| Wide measuring ranges | LCD display | High precision |
| Low pressure drop | Small size | Fast response |
Technical Data
| Model Number: | Accuracy: 1.0% |
Working pressure: 3MPa | Material of base: 316L |
Flow range: 30SLM~300SLMM | Glad hand:Φ3/Φ6/Φ10/1/8〞/1/4〞/3/8〞 |
Power: DC+15V | Digital value: RS485 MODBUS |
Downloads
Micro gas mass flowmeter
Dateiformat P D F
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Looking For Professional Flow Meters? Partner With The Best.
sales3@gnflowmeter.com
+86 18930647859
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Shanghai Cixi Instrument CO.,LTD was founded in 2008 and is located in Shanghai Songjiang industrial park. We are the professional flow meter manufacture who integrate R&D, production and sales as one manufacturers.
Contact Us
Contact person: Kenny Shao
Contact phone number: +86 18930647859
Email: sales3@gnflowmeter.com
WhatsApp: 86 18930647859
Company address: Room 402 Shuangzi Building B, Caohejing Hi Tech Park, No. 650 Xin Zhu Road, Songjiang District, Shanghai, China Zip code: 201601
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