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CX-F7 Micro gas mass flowmeter 1
CX-F7 Micro gas mass flowmeter 1

CX-F7 Micro gas mass flowmeter

Mass Flow Controller(MFC)Used to accurately measure and control the mass flow of gas. They play an important role in scientific research and production in various fields such as semiconductors and integrated cir- cuit industries,special materials disciplines, chemical industry, and indu- strial, pharmaceutical, environmental protection, and vacuum lamps. Typical applications include: electronic process equipment such as dif- fusion,epitaxy,CVD,oxidation,plasma etching,sputtering,and ion impla- ntation ; and coating equipment, optical fiber smelting, microreaction devices, mixed gas distribution systems, capillary measurement, Gas chromatographs and other analytical instruments
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    Features

    Wide measuring rangesMicroHigh precision
    Low pressure dropSmall sizeFast response

    Technical Data

    Model Number: CX-F7

    Accuracy: 0.5%

    Working pressure: 3MPa

    Material of base: 316L

    Flow range: 30~3000slm

    Glad hand:Φ3/Φ6/Φ10/1/8〞/1/4〞/3/8〞

    Power: DC +15V/24V

    Digital value: RS485 MODBUS

    Used to accurately measure and control the mass flow of gas

    The digital type is the left side style, with LCD display, instantaneous and total flow, pressure, temperature can be displayed at the same time and can be equipped with RS485/232, the MODBUS protocol analog type is the right side style, without digital display and no communication function

    The range ratio of the flowmeter is 1:100, the valve control range of the controller is 1:50 the minimum can measure 2SCCM and the maximum can measure 3000SLM

    The base material of the flow meter controller is S316L, and the material that contacts the gas is also SS316L. It can measure some weak corrosive gases. When measuring other strong corrosive gases and organic solvent gases, it should be declared when ordering.

    The standard accuracy of gas mass flowmeters is 0.5%. 1.0% of reading, and the repeatability of 0.5% full scale accuracy is 0.2%. The accuracy of the controller is 1.0% (full scale accuracy)

    The flow range of the miniature gas mass flow controller is the same as that of the flowmeter, the valve control range ratio is 50:1, and the proportional control valve accuracy is 1.0%.

    Digital value RS485 MODBUS；Analog value DC 0~5V ，4~20mA

    Mass Flow Controller(MFC)Used to accurately measure and control the mass flow of gas. They play an important role in scientific research and production in various fields such as semiconductors and integrated cir- cuit industries,special materials disciplines, chemical industry, and indu- strial, pharmaceutical, environmental protection, and vacuum lamps. Typical applications include: electronic process equipment such as dif- fusion,epitaxy,CVD,oxidation,plasma etching,sputtering,and ion impla- ntation ; and coating equipment, optical fiber smelting, microreaction devices, mixed gas distribution systems, capillary measurement, Gas chromatographs and other analytical instruments

    note: The mass flow meter and mass flow controller are usually calibrated with nitrogen (N2). The unit of mass flow is stipulated as: SCCM (Standard ml/min); SLM(Standard l/min) Standard state stipulates: temperature -----273.15K (0℃); Pressure -----101325 Pa(760mm Hg） F.S (Full Scale); Full-scale value

    Micro gas mass flowmeter(图10)

    Micro gas mass flowmeter(图11)

    Micro gas mass flowmeter(图12)

    Micro gas mass flowmeter(图13)

    Micro gas mass flowmeter(图14)


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    Shanghai Cixi Instrument CO.,LTD was founded in 2008 and is located in Shanghai Songjiang industrial park. We are the professional flow meter manufacture who integrate R&D, production and sales as one manufacturers.
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    Contact phone number: +86 18930647859
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    Company address: Room 402 Shuangzi Building B, Caohejing Hi Tech Park, No. 650 Xin Zhu Road, Songjiang District, Shanghai, China Zip code: 201601
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