Products list
MFM-50 series Gas mass flow controller
MFM-50 series Mass Flow Meter (MFM) is used for high-precision measurement of gas flow. The series of MFM is based on the industry’s advanced MEMS flow sensor chip and the aviation aluminum polished gas flow channel, combined with core calibration and compensation algorithm, suitable for high-precision detection of a variety of clean and dry gases. Its typical precision is ±1.5%, measurement range ratio is better than 500:1, and the range can be customized (from 50 SCCM to 300 SLM). In addition, MFM-50 series is equipped with LCD display and digital output, which is convenient for users to debug on site and remotely. The product is low cost, easy to install and does not require temperature and pressure compensation.
Features
| Wide measuring ranges | Micro | High precision |
| Low pressure drop | Small size | Fast response |
Technical Data
| Model Number: / | Current signal: 4-20mA |
Accuracy: ±1.5% F.S. | Repeatability: 0.25% |
Flow range: 0~100SLM | Range ratio: 500：1 |
Flow rate and pressure loss: <100Pa | Pressure: 0~0.6MPa |
Downloads
Dateiformat P D F
