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CX-OGFM oval gear flowmeter
Mass Flow Controller(MFC)Used to accurately measure and control the
mass flow of gas. They play an important role in scientific research and
production in various fields such as semiconductors and integrated cir-
cuit industries,special materials disciplines, chemical industry, and indu-
strial, pharmaceutical, environmental protection, and vacuum lamps.
Typical applications include: electronic process equipment such as dif-
fusion,epitaxy,CVD,oxidation,plasma etching,sputtering,and ion impla-
ntation ; and coating equipment, optical fiber smelting, microreaction
devices, mixed gas distribution systems, capillary measurement, Gas
chromatographs and other analytical instruments
Features
| Wide measuring ranges | LCD display | High precision |
| Low pressure drop | Small size | Fast response |
Technical Data
| Model Number: CX-EMFM | Accuracy: 0.5% |
Working pressure: 1.6Mpa,2.5Mpa,4Mpa | Material: cast steel/stainless steel/cate iron |
Viscosity of liquid: 0.6-200MPa.s | Flow range: 0.6-200m2/h |
Power: 12VDC | Working temperature: -10~100℃,-30~160℃ |
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