Low range Differential pressure gas mass flow meter

Mass Flow Controller(MFC)Used to accurately measure and control the mass flow of gas. They play an important role in scientific research and production in various fields such as semiconductors and integrated cir- cuit industries,special materials disciplines, chemical industry, and indu- strial, pharmaceutical, environmental protection, and vacuum lamps. Typical applications include: electronic process equipment such as dif- fusion,epitaxy,CVD,oxidation,plasma etching,sputtering,and ion impla- ntation ; and coating equipment, optical fiber smelting, microreaction devices, mixed gas distribution systems, capillary measurement, Gas chromatographs and other analytical instruments

Features

Wide measuring rangesLCD displayHigh precision
Low pressure dropSmall sizeFast response

Technical Data

Model Number: 

Accuracy: 1.0%

Working pressure: 3MPa

Material of base: 316L

Flow range: 100SCCM~30SLM

Glad hand:Φ3/Φ6/Φ10/1/8〞/1/4〞/3/8〞

Power: DC+15V

Digital value: RS485 MODBUS

Used to accurately measure and control the mass flow of gas

It can measure nitrogen, hydrogen, oxygen, measuring  range ratio 1:100, built-in 30 kinds of gas coefficient  conversion, accuracy 1.0%

Low range mid range

The base material of the flow controller is S316L, and the material  contacting the gas is also SS316L, which can measure some  weakly corrosive gases.

Instantaneous and total flow, pressure,  temperature can be displayed at the same time

The flow range of the micro gas mass flow  controller is the same as that of the flow  meter,  the valve control range ratio is 50:1,  and the precision of the proportional  control valve is 1.0%

Tinned copper core, multiple shielding, stable data transmission

Mass Flow Controller(MFC)Used to accurately measure and control the mass flow of gas. They play an important role in scientific research and production in various fields such as semiconductors and integrated cir- cuit industries,special materials disciplines, chemical industry, and indu- strial, pharmaceutical, environmental protection, and vacuum lamps. Typical applications include: electronic process equipment such as dif- fusion,epitaxy,CVD,oxidation,plasma etching,sputtering,and ion impla- ntation ; and coating equipment, optical fiber smelting, microreaction devices, mixed gas distribution systems, capillary measurement, Gas  chromatographs and other analytical instruments

Flow range: AccuracyLinearityRepeatabilityResponding time Differential pressure range Max pressure working temperature Digital value Analog valuePower supplyElectrical connection Leakage rateMaterial of baseSeal materialGlad hand

CX-F1 Micro gas mass flowmeter(图10)

CX-F1 Micro gas mass flowmeter(图11)

CX-F1 Micro gas mass flowmeter(图12)

CX-F1 Micro gas mass flowmeter(图13)

CX-F1 Micro gas mass flowmeter(图14)


Downloads

Micro gas mass flowmeter

Dateiformat P D F

Application Area

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